Model | Metrix+ Microsurf 10A | ||
Standards | ISO 4287 International standard, DIN 4768 German standard, JISB 601 Japanese standard, ANSI B46.1 American standard | ||
Measuring range | Ra, Rq : 0.005 ~ 16.00 um / 0.020 ~ 629.9 uinch | ||
Rz, Rt : 0.020 ~ 160.0 um / 0.078 ~ 6299 uinch | |||
Accuracy | < + 10% | ||
Resolution | 0.001um when reading <10um | ||
0.01um when reading >= 10um and <100um | |||
0.1um when reading >= 100um | |||
Fluctuation of display value | <=6% | ||
Profile Digital Filter | Filter contour : RC, PC-RC, Gauss | ||
Non-filter contour : D-P | |||
Sensor | Test Principle | Induction type | |
Radius of probe pin | 10um default 2um | ||
Material of probe pin | Diamond | ||
Measurement force of probe | 16mN(1.6gf) for 10um and 0.75mN(0.075gf) for 2um | ||
Probe angle | 90o | ||
Vertical radius of guiding head | 48mm | ||
Maximum driving stroke | 17.5mm / 0.7inch | ||
Cut off length | 0.25mm / 0.8mm / 2.5mm | ||
Driving speed | When measuring | Vt = 0.135mm/s if sampling length = 0.25mm | |
Vt = 0.5mm/s if sampling length = 0.8mm | |||
Vt = 1mm/s if sampling length = 2.5mm | |||
During return | Vt = 1mm/s | ||
Probe measuring range | +80um | ||
Evaluation length | 1 ~ 5L selectable | ||
Power | Li-ion rechargeable battery | ||
Working conditions | Temperature : 0 ~ 50oC ; Humidity : <85% | ||
Standard accessories | Main unit, probe, standard sample plate, charger with adapter, adjustable leg, sheath of sensor, operational manual | ||
Optional accessories | PC interface, adaptor sleeve(extension rod), deep groove sensor |